Fused quartz and silica plates are needed in the semiconductor industry for the manufacturing of batch processing equipment as well as single wafer processing equipment.
In the semiconductor industry fused quartz and silica plates are needed for the fabrication of boats, pedestals, wafer and wafer carriers in the field of batch processing equipment. For single wafer processing equipment plates are used to make windows, gas distribution plates, shower plates, wafer carriers and susceptors.
For addressing the most demanding needs of the semiconductor industry, Heraeus Conamic produces synthetic fused silica plates from HSQ®900 and Spectrosil ingots. All Heraeus synthetic materials are characterized by parts per billion class purity and zero bubble content .
In the following you will find an overview of the different fusion technologies that Heraeus Conamic can utilize, each highlighted by the leading material advantage in this segment.
Fused quartz and silica plates are needed in the semiconductor industry for the manufacturing of batch processing equipment as well as single wafer processing equipment. Heraeus Conamic manufactures fused quartz and silica plates in a variety of material grades and dimensions. The provided plates are characterized by high purity and material homogeneity while maintaining low bubble contents.
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